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Facilities

Lab Facilities:

Fabrication: 

  • Olympus series equipped with a 5-megapixel digital camera × 2

  • Home-made 2D-staking Transfer platform × 2

  • Pumping Station × 3

  • Rapid Thermal Annealing

  • Spin coater/hot-plate/ultrasonic cleaner

  • Thermal evaporation​ with 2 boats

  • UV-Ozone dry cleaner UV-1

  • LED lithography

  • JEOL IT 700HR equipped with RAITH ELPHY Quantum Lithography System​ (for lithography)

  • JEOL JSM 7610F (for observations)

Measurement: 

  • Vigor Glovebox equipped with a room-temperature Probe station

  • Lake Shore-Model TTPX Cryogenic Probe Station with vibration isolation (operation from 4.2 K to 475 K) × 2

  • Keysight Precision SourceMeter

  • Keysight High-Resistance Meter

  • Keysight InfiniVision Oscilloscope

  • Keysight Semiconductor Device Parameter Analyzer × 2 

  • Noise Measuring System (1 Hz up to 10000 Hz)

  • Tunable light-power sources (wavelength: 405, 520, 650, 780, 850 nm) 

 

Other Available Facilities:

  • High-resolution E-beam Lithography Systems (Off-campus, Hsinchu City)

  • Atomic Force Microscope​ (On-campus)

  • Raman Spectrometer (On-campus)

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test room

test room

© Research Grants are supported by the Taiwan Ministry of Science of Technology (MOST) and our collaborators. This website was built in Apr. 2019. Copyright 2019 LIN Research Group, National Chung Hsing University (NCHU), Taichung 402, Taiwan.

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