Facilities
Lab Facilities:
Fabrication:
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Olympus series equipped with a 5-megapixel digital camera × 2
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Home-made 2D-staking Transfer platform × 2
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Pumping Station × 3
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Rapid Thermal Annealing
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Spin coater/hot-plate/ultrasonic cleaner
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Thermal evaporation with 2 boats
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UV-Ozone dry cleaner UV-1
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LED lithography
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JEOL IT 700HR equipped with RAITH ELPHY Quantum Lithography System (for lithography)
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JEOL JSM 7610F (for observations)
Measurement:
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Vigor Glovebox equipped with a room-temperature Probe station
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Lake Shore-Model TTPX Cryogenic Probe Station with vibration isolation (operation from 4.2 K to 475 K) × 2
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Keysight Precision SourceMeter
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Keysight High-Resistance Meter
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Keysight InfiniVision Oscilloscope
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Keysight Semiconductor Device Parameter Analyzer × 2
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Noise Measuring System (1 Hz up to 10000 Hz)
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Tunable light-power sources (wavelength: 405, 520, 650, 780, 850 nm)
Other Available Facilities:
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High-resolution E-beam Lithography Systems (Off-campus, Hsinchu City)
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Atomic Force Microscope (On-campus)
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Raman Spectrometer (On-campus)
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![]() IMG_6294 | ![]() test room |









